http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003035507-A

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filingDate 2001-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003035507-A
titleOfInvention Surface shape recognition sensor and method of manufacturing the same
abstract (57) [Problem] To provide a surface shape recognition sensor in consideration of stability, sensitivity, and reliability. SOLUTION: An insulating film 107 is formed to a thickness of 0.1 μm, and a resist pattern 108 having a film thickness of about 1 μm is formed in an upper region of the sensor electrode 104a so as to cover the entire sensor electrode 104a. As a mask, the insulating film 107 is selectively etched to form an electrode insulating film 107a covering the sensor electrode 104a.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014115282-A
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Total number of triples: 27.