| abstract |
There is provided a structure. The structure comprises a substrate (12), and a titanium oxide layer (14) disposed over the substrate (12). There is also provided a method of forming a titanium oxide coating (14) on a substrate (12). The method includes generating a plasma; providing a first reactant, comprising titanium, and a second reactant, comprising oxygen, into the plasma stream extending to the substrate (12); and forming the titanium oxide coating (14) on the substrate (12). |