| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8381805eba6d034fc77bd230dd02e6e2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-25 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2003-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38a23d73c6f78d5b635cd1febb0973cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81aa12d8b329fd124b6336c6956132f3 |
| publicationDate |
2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2004001810-A2 |
| titleOfInvention |
Coplanar integration of lattice-mismatched semiconductor with silicon via wafer boning virtual substrates |
| abstract |
A method of bonding lattice-mismatched semiconductors is provided. The method includes forming a Ge-based virtual substrate and depositing on the virtual substrate a CMP layer that forms a planarized virtual substrate. Also, the method includes bonding a Si substrate to the planarized virtual substrate and performing layer exfoliation on selective layers of the planarized virtual substrate producing a damaged layer of Ge. Furthermore, the method includes removing the damaged layer of Ge. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2889887-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7361592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8609514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2886763-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007020351-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1732122-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8142593-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8778775-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1732122-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8252663-B2 |
| priorityDate |
2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |