| abstract |
A radiation-sensitive patterning composition comprising: (1) at least one acid generating compound selected from compounds of formula (I) and formula (II) wherein: R1, R2, R3, R4, R5, and R6, are independently selected from the group consisting of hydrogen, nitro, hydroxyl, carbonyl, halogen, cyano, unsubstituted and substituted alkyl groups, unsubstituted and substituted cycloalkyl groups; unsubstituted and substituted alkoxy groups, and unsubstituted and substituted aryl groups; wherein: X+ is an onium ion selected from the group consisting of diazonium, iodonium, sulfonium, phosphonium, bromonium, chloronium, oxysulfoxonium, oxysulfonium, sulfoxonium, selenium, tellurium and arsenium; and n is an integer from 4 to 100; (2) at least one cross-linking agent cross-linkable by an acid; (3) at least one polymer compound capable of reacting with the cross-linking agent; and (4) at least one infrared absorbing compound. |