| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a14ef511c024661e8ef1d0a54f36377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1544cb1b68a2fedd69e7a8bdf06776f6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10 |
| filingDate |
2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c0141e3231ef6a6b312b009d0f0b40a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0df1a93da3edb5aa5113a6cdd9322e43 |
| publicationDate |
2003-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03045959-A1 |
| titleOfInvention |
Hexakis (monohydrocarbylamino) disilanes and method for the preparation thereof |
| abstract |
(Problems) - To provide silane compounds that are free of chlorine, that provide excellent film-forming characteristics at low temperatures in the case of silicon nitride films and silicon oxynitride films, and that also have excellent handling characteristics. Also, to provide a method for preparing these silane compounds. (Solution) - Hexakis (monohydrocarbylamino) dislanes with general formula (I) ((R) HN)3 - Si - Si - (NH (R))3 (I) wherein each R independently represents C1 to C4 hydrocarbyl. These disilanes can be synthesized by reacting hexachlorodisilane in organic solvent with at least 6-fold moles of the monohydrocarbylamine RNH2 (wherein R is C1 to C4 hydrocarbyl). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8367854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11274112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11780859-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10494387-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9777025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101366927-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11407922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10403494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8377511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9382269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009001088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9920078-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010094610-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11699584-B2 |
| priorityDate |
2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |