http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0212962-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc05229904be2987713acc8b41db7cd3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0a16389b15446e9e30682cc37facf1f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2001-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_886e55ca146ef07c33461476047a68d6 |
| publicationDate | 2002-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-0212962-A1 |
| titleOfInvention | Aqueous surfactant solution for developing coating film layer |
| abstract | An aqueous surfactant solution for developing a coating film layer which comprises at least one surfactant selected from among a N-acylsarcosinate, a N-acyl-N-methylalaninate, a N-acyltaurinate, a N-acyl-N-methyltaurinate, a fatty acid alkylolamide and an adduct of a fatty acid alkylolamide and a polyoxyethylene. The aqueous surfactant solution is used as a developing solution in a method for narrowing the width between resist patterns which comprises forming a water-soluble resin coating film layer on a resist pattern having been formed by a conventional method, crosslinking the coating film layer by the action of an acid supplied from the resist pattern, and then dissolving and removing the uncrosslinked part of the coating film by the use of a developing solution, to thereby fatten the resist pattern. |
| priorityDate | 2000-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 86.