| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate |
2000-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56c36bdd2435082ce55f0214ec98b0da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56bc02212608be345b9140c6b4f74c33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6617d0e6ec473b7d3e824ff99fb83740
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1b8b0b6731c90c4eb2ab3eb3f633cbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2a6610b902a45f444f54de44c239337 |
| publicationDate |
2000-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0044047-A1 |
| titleOfInvention |
Microelectronic structure |
| abstract |
A microelectronic structure comprising grooves (30) and contact openings (25) within a first layer (5) or a substrate (5). A metal nitride layer (45) covering at least partially the said first layer (5) or the substrate (5) comprising a material selected from the group consisting of TiN and WN. On top of that metal nitride layer (45) a tantalum layer (50) is deposited. Finally, a metal (75) is deposited to completely fill the grooves (30) and the contact openings (25). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1397830-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1397830-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02056342-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02080267-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02080267-A2 |
| priorityDate |
1999-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |