| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b6caea61bfde8a45e01a8deabff80d97 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42344
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11582 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11582
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2017-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7abe207d69364991fd2fd0f5b7d662a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2442f78fc9835ecdbe086c06c1676c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67b2e410b7817c2b2ae881f81a16eaae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b81ea428189e2842b1fec16402bbc5c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2299a025a2aed6b0c65d5bff46b62bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b93389fb44e0db9a4291ffdd1de29952 |
| publicationDate |
2018-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9960180-B1 |
| titleOfInvention |
Three-dimensional memory device with partially discrete charge storage regions and method of making thereof |
| abstract |
Memory openings can be formed through an alternating stack of insulating layers and sacrificial material layers. Memory stack structures including charge storage elements can be formed in the memory openings. Inter-level charge leakage in a three-dimensional memory device including a charge trapping layer can be minimized by employing a thin continuous charge trapping material layer within each memory opening. After removal of the sacrificial material layers and formation of backside recesses, discrete charge trapping material portions can be formed by selective growth of a charge trapping material from physically exposed surfaces of each thin continuous charge trapping material layer. The discrete charge trapping material portions can function as primary charge storage regions, and inter-level charge leakage can be minimized by the small thickness of the thin continuous charge trapping material layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11469241-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11729979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11227870-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11489043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11398496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10516025-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101289-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114462-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113745234-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11631697-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11659711-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021375752-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11257841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10998331-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022293625-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11444094-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114534-B2 |
| priorityDate |
2017-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |