| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 |
| filingDate |
2017-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9109b68b55594387713c374f294c46cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b90232432b1b2a1f0cdb01aa84d55af9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_687f8505a168bd6f3efba038565c532b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37323d0862d74c130a482465f3eb81b5 |
| publicationDate |
2018-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9935014-B1 |
| titleOfInvention |
Nanosheet transistors having different gate dielectric thicknesses on the same chip |
| abstract |
Embodiments are directed to a method and resulting structures for forming thin and thick gate dielectric nanosheet transistors on the same chip. A first nanosheet stack having a first sacrificial layer between a first nanosheet and a second nanosheet is formed on a substrate. A second nanosheet stack having a first sacrificial layer between a first nanosheet and a second nanosheet is formed on the substrate. The first nanosheet of the first nanosheet stack is doped and concurrently removed with the first sacrificial layer of the first nanosheet stack and the first sacrificial layer of the second nanosheet stack. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10243054-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062959-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937787-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113937163-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021167064-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11276576-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113223961-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113223961-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110660802-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020006333-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387319-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11211474-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10332809-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111244038-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11121218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734286-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019237336-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886368-B2 |
| priorityDate |
2017-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |