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publicationDate 2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9892932-B2
titleOfInvention Chemistries for TSV/MEMS/power device etching
abstract Replacement chemistries for the cC 4 F 8 passivation gas in the Bosch etch process and processes for using the same are disclosed. These chemistries have the formula C x H y F z , with 1 ≦x<7, 1≦y≦13, and 1≦z≦13. The replacement chemistries may reduce RIE lag associated with deep silicon aperture etching.
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