| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76a4667969472ddc72c7343162b48f10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0058 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28D5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1c8447c76e6a3586f7e479422171a87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9545dfb893635c8945d44a3fb4967b1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da688da8149a6d1ec56975bdfff47256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6befaba510e2e59976773afbb581f95e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d67c135f76c93ed5a5eed13320f504d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a7ed8991299c44a75e1e60958e689c6 |
| publicationDate |
2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9852948-B2 |
| titleOfInvention |
Apparatus and method for processing a substrate |
| abstract |
A method of processing a substrate is disclosed. The method includes the following steps: providing a substrate body having a surface; placing a die on the surface, wherein the die acts as a catalyst; immersing the substrate body and the die in a reaction solution; and processing the substrate body via a chemical reaction occurring on the surface through the reaction solution and the catalyst. |
| priorityDate |
2015-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |