| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87652 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-00 |
| filingDate |
2014-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85dfb1c9161117d786ab3cffadef1e00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a101fc029bcf93f4c4408ee1153d2350
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b532d672a2393bdb7b835c5338e5d0d |
| publicationDate |
2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9770804-B2 |
| titleOfInvention |
Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture |
| abstract |
A slurry and/or chemical blend supply apparatus suitable for providing slurry and/or chemical blend to chemical mechanical planarization (CMP) tools or other tools in a semiconductor fabrication facility, related processes, methods of use and methods of manufacture. The slurry and/or chemical blend supply apparatus includes one or more of the following: feed module, blend module, analytical module and distribution module. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11135698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016368114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019381457-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10792618-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11692896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021072107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019162617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11633835-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396083-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020189068-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11772234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11266959-B2 |
| priorityDate |
2013-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |