http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7695589-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate | 2004-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4818c207722b7c05133fa30b6b579bb7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbfe0d19e9f5160b2aa2d0fc113e2e85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b861e1a148e886ae97e25e1123e1bd8 |
| publicationDate | 2010-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7695589-B2 |
| titleOfInvention | Versatile system for conditioning slurry in CMP process |
| abstract | The present invention provides a system ( 100 ) for conditioning multi-component slurries utilized in chemical mechanical polishing (CMP) of semiconductor wafers ( 140 ). The system provides a first slurry component ( 108 ), and a second slurry component ( 120 ). A conditioning component ( 102 ) has first and second inlets, and an outlet operatively coupled to a dispensing system ( 138 ). First and second flow control components ( 116, 126 ) are operably intercoupled between the first and second inlets and the first and second slurry components, respectively. The system further provides a megasonic energy source ( 106 ), adapted to generate an energy field ( 118 ) across the conditioning component. A conveyance component ( 114 ) conducts the slurry components from the inlets through the energy field, and delivers a final mixture ( 136 ) of multi-component slurry to the outlet. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10562151-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012289134-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9770804-B2 |
| priorityDate | 2004-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.