Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c85d78c6a4459b5dbbc49c82a4c5c107 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L23-0815 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L23-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L23-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L23-142 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-002 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F293-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate |
2016-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2017-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b448a20ddd314c14d07d169aa03bc292 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5abf3c68e5b0e031e4e92d789a3fe44c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5431e000d3e5004a4fe83a65a63107a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f1b928dc05323e09e06b0b4214e4d8c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_175daa1584d10fe872f8c828fbf6e2e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3adcb78fd782bc9a4efd2dc3483d0292 |
publicationDate |
2017-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9703203-B2 |
titleOfInvention |
Compositions and methods for pattern treatment |
abstract |
Pattern treatment compositions comprise a block copolymer and an organic solvent. The block copolymer comprises a first block and a second block. The first block comprises a unit formed from a first monomer comprising an ethylenically unsaturated polymerizable group and a hydrogen acceptor group, wherein the hydrogen acceptor group is a nitrogen-containing group. The second block comprises a unit formed from a second monomer comprising an ethylenically unsaturated polymerizable group and a cyclic aliphatic group. Wherein: (i) the second block comprises a unit formed from a third monomer comprising an ethylenically unsaturated polymerizable group, and the second monomer and the third monomer are different; and/or (ii) the block copolymer comprises a third block comprising a unit formed from a fourth monomer comprising an ethylenically unsaturated polymerizable group, wherein the fourth monomer is different from the first monomer and the second monomer. Also provided are pattern treatment methods using the described compositions. The pattern treatment compositions and methods find particular applicability in the manufacture of semiconductor devices for providing high resolution patterns. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10162265-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017170008-A1 |
priorityDate |
2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |