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filingDate 2016-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9653460-B1
titleOfInvention Semiconductor device and method of fabricating the same
abstract A semiconductor device and a method of fabricating the same, the semiconductor device includes a substrate, a first gate and a second gate. The first gate is disposed on the substrate and includes a first gate insulating layer, a polysilicon layer, a silicide layer and a protective layer stacked with each other on the substrate and a first spacer surrounds the first gate insulating layer, the polysilicon layer, the silicide layer and the protective layer. The second gate is disposed on the substrate and includes a second gate insulating layer, a work function metal layer and a conductive layer stacked with each other on the substrate, and a second spacer surrounds the second gate insulating layer, the work function metal layer and the conductive layer.
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