| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_429e11be3aab8c1842391882c3f0dbe4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a1f29b9e4e1eac3b575ce7f53c686ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_adef56e25869e75e3cbc9cd236678870 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02658 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0075 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32 |
| filingDate |
2012-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff690dba43bbec69440d96eef3f34bd6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0396105284893039e12c0625f0e8a98 |
| publicationDate |
2017-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9646827-B1 |
| titleOfInvention |
Method for smoothing surface of a substrate containing gallium and nitrogen |
| abstract |
Disclosed is a method for processing GaN based substrate material for manufacturing light-emitting diodes, lasers, and other types of devices. In various embodiments, a GaN substrate is exposed to nitrogen and hydrogen at a high temperature. This process causes the surface of the GaN substrate to anneal and become smooth. Then other processes, such as growing epitaxial layers over the surface of GaN substrate, can be performed over the smooth surface of the GaN substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304947-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600891-B2 |
| priorityDate |
2011-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |