| abstract |
The present invention relates to novel copolymers containing cross-linkable and graft-able moieties, novel compositions comprised of these novel copolymers and a solvent, and methods for using these novel compositions to form neutral layer films which are both cross-linked and grafted on the substrate which are used in processes for aligning microdomains of block copolymers (BCP) on this neutral layer coated substrate such as self-assembly and directed self-assembly. The novel compositions are comprised of at least one novel random copolymer comprised of least one unit of structure (1), at least one unit of structure (2) at least one unit of structure (3) one H end group and one end group having structure (1′); n nwhere R 1 is selected from the group consisting of a C 1 -C 8 alkyl, C 1 -C 8 fluoroalkyl, C 1 -C 8 partially fluorinated alkyl moiety, C 4 -C 8 cycloalkyl, C 4 -C 8 cyclofluoroalkyl, C 4 -C 8 partially fluorinated cycloalkyl, and a C 2 -C 8 hydroxyalkyl; R 2 , R 3 and R 5 are independently selected from a group consisting of H, C 1 -C 4 alkyl, CF 3 and F; R 4 is selected from the group consisting of H, C 1 -C 8 alkyl, C 1 -C 8 partially fluorinated alkyl moiety and C 1 -C 8 fluoroalkyl, n ranges from 1 to 5, R 6 is selected from the group consisting of H, F, C 1 -C 8 alkyl and a C 1 -C 8 fluoroalkyl and m ranges from 1 to 3, and n′ ranges from 1 to 5, and n″ ranges from 1 to 5, n′″ ranges from 1 to 5, R 7 is a C 1 to C 8 alkyl and X is —CN, or an alkyloxycarbonyl moiety R 8 —O—(C═O)— where R 8 is a C 1 to C 8 alkyl and represent the attachment point of the end group to the polymer. The novel polymers, compositions and processes are useful for fabrication of electronic devices. |