| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7853
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0653 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2016-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33b0ef2dd4bd9622eb89f8bba4eda9ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_337c73316e986c8c90bc56901d0a2631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3e3e0e2a450375b8c45205fd01f1431 |
| publicationDate |
2016-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9515138-B1 |
| titleOfInvention |
Structure and method to minimize junction capacitance in nano sheets |
| abstract |
A method of making a semiconductor device includes forming a nanosheet stack including a first layer and a second layer; patterning a gate stack on the nanosheet stack; forming a first spacer along a sidewall of the gate stack; removing an endwall portion of the nanosheet stack that extends beyond the first spacer such that a portion of the second layer is exposed from a sidewall of the first spacer; depositing a second spacer along a sidewall of the first spacer; recessing the substrate beneath the second spacer to form an isolation region; depositing an oxide on the gate stack and within the isolation region and partially recessing the oxide; removing a portion of the second spacer such that the portion of the second layer is exposed; and growing an epitaxial layer on the portion of the second layer that is exposed to form a source/drain over the isolation region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10930649-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171208-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269983-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11133396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11652161-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11588052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10211322-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541318-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180115392-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734502-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11183558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3608965-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10790393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11676964-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11688626-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017263728-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11444081-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019172940-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I770100-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108695378-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108695378-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109300973-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109300973-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728403-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11195746-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10396177-B2 |
| priorityDate |
2015-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |