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filingDate 2021-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e45152df2b4933cdb97d6633194936fe
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publicationDate 2022-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11444081-B2
titleOfInvention Integrated circuit (IC) device
abstract An integrated circuit (IC) device includes: a fin-type active area protruding from a substrate and extending in a first horizontal direction; a first nanosheet disposed above an upper surface of the fin-type active area with a first separation space therebetween; a second nanosheet disposed above the first nanosheet with a second separation space therebetween; a gate line extending on the substrate in a second horizontal direction intersecting the first horizontal direction, at least a portion of the gate line being disposed in the second separation space; and a bottom insulation structure disposed in the first separation space.
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