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filingDate 2015-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9505030-B2
titleOfInvention Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
abstract Micromachined ultrasonic transducers formed in complementary metal oxide semiconductor (CMOS) wafers are described, as are methods of fabricating such devices. A metallization layer of a CMOS wafer may be removed by sacrificial release to create a cavity of an ultrasonic transducer. Remaining layers may form a membrane of the ultrasonic transducer.
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