patent/US-9397008-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9397008-B1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823437 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41791 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
filingDate	2015-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2016-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbffbe577124483d0c4cd4aa63d17178 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f67ef8ccd3f96c624ef8625102a76fdb
publicationDate	2016-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-9397008-B1
titleOfInvention	Semiconductor device and manufacturing method of conductive structure in semiconductor device
abstract	A manufacturing method of a conductive structure in a semiconductor device includes the following steps. A plurality of gate structures are formed on a semiconductor structure, and a first dielectric layer is formed in space between the gate structures. A first process is then performed to remove at least a part of the first dielectric layer in the space between the gate structures. A second dielectric layer is then formed and covers the gate structures so as to form at least one air void in the space between the gate structures. A second process is performed to form at least one opening penetrating the second dielectric layer and exposing the air void. The air void exposed by the opening is then filled with at least one conductive material for forming a conductive structure between the gate structures.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10700163-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10158007-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9570556-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11508849-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10366988-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10700208-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9812576-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I667699-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831346-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107665864-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107665864-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10784258-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10957762-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I671855-B
priorityDate	2015-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016064281-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5949143-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014117455-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015064863-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011303967-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578708 http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID314243 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID314243

Total number of triples: 64.