http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9194041-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 |
| filingDate | 2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_066eb237f6ada51a7bbaf0d39f805d78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33e089881ea9874599e16fe6c4fd9656 |
| publicationDate | 2015-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9194041-B2 |
| titleOfInvention | Tris(dialkylamide)aluminum compound, and method for producing aluminum-containing thin film using same |
| abstract | The present invention relates to a tris(dialkylamide)aluminum compound, and a method for producing an aluminum-containing thin film using the aluminum compound, the tris(dialkylamide)aluminum compound being represented by the formula (1): n nwhereinn R represents a linear alkyl group having 1 to 6 carbon atoms; and R 1 , R 2 and R 3 may be the same as, or different from each other, and each independently represents hydrogen atom, or a linear or branched alkyl group having 1 to 6 carbon atoms, or R 1 , R 2 and R 3 may be joined together to form a ring,n nwith the proviso that the compounds in which two or more of R 1 , R 2 and R 3 are hydrogen atoms are excluded, andn three dialkylamide ligands may be the same as, or different from each other. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10224200-B2 |
| priorityDate | 2011-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 259.