| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca5ff9cbed92537c43cf29f6bb376052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a67313d41848eaeb01a21dc7ab55471d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00b9d664f1dadc2cad9c27d8a5f450b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_112de5e61cb3e48046678b514b83f96b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate |
2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5c26590f444e0b4d4d45f05b81e5562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e0ec393794a596fe74625ebd92533f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d5ecd8da9144ba2d1ec5f095a1cfef2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e3fbf13958491ba30bacc82d886cbdf |
| publicationDate |
2015-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9165818-B2 |
| titleOfInvention |
Method for forming insulating film |
| abstract |
[Problem] To provide a method capable of forming an insulating film having homogeneous and high bulk density and less suffering defects. n [Means for solving] A substrate surface is coated with a silicon dioxide dispersion containing silicon dioxide fine particles, a polymer, a surfactant and a dispersion medium; and then further coated with a polysilazane composition; and thereafter heated to form an insulating film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10647578-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11739220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11203528-B2 |
| priorityDate |
2011-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |