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filingDate 2012-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9164275-B2
titleOfInvention Display device
abstract A display device includes: a plurality of pixels each having a shutter plate formed and an actuator portion, wherein the actuator portion has a beam portion connected to the shutter plate, a drive electrode causing the beam portion to bend to drive the shutter plate, a first supporting portion supporting the drive electrode and fixed on a substrate, and a second supporting portion supporting the beam portion and fixed on the substrate, at least one of the first supporting portion and the second supporting portion has a planar portion, and a recessed portion formed to be concaved from the planar portion and connected to the substrate, and the recessed portion has a vertically formed portion formed to be inclined substantially vertically from the planar portion, and a portion starting from the vertically formed portion and formed such that the inclination of the portion becomes gentle toward the substrate.
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