| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d21cbff64022f95c237c0bd3ec8656ca |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2252-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D137-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D137-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1274671d73466b13994a1c0b53291ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37220299846deb95d998e38b76da1920
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de40cc7e10c82f8a6a478a498c1259eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_663a5c9e354ea0101d3f60d19cc3b06d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7450b4cac03b9830e557109f9e4a44de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a918e917b3dcbc07131c70ec8bb6202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20eebb6152b9294283fa8304ee564b27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d6670b1398ea92daaab28e925b784f5 |
| publicationDate |
2015-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9157008-B2 |
| titleOfInvention |
Anhydride copolymer top coats for orientation control of thin film block copolymers |
| abstract |
Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11518730-B2 |
| priorityDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |