http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9142778-B2

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filingDate 2013-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9142778-B2
titleOfInvention High vacuum OLED deposition source and system
abstract Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.
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