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filingDate 2012-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9111897-B2
titleOfInvention Methods of forming a polysilicon layer and methods of manufacturing semiconductor devices
abstract A method of forming a polysilicon layer includes providing a silicon precursor onto an object loaded in a process chamber to form a seed layer. The silicon precursor includes a nitrogen containing silicon precursor and a chlorine containing silicon precursor. The method further includes providing a silicon source on the seed layer.
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