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publicationDate 2012-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012178264-A1
titleOfInvention Method and apparatus for forming silicon nitride film
abstract A method of forming a silicon nitride film on the surface of an object to be processed, the method including forming a seed layer functioning as a seed of the silicon nitride film on the surface of the object to be processed by using at least an aminosilane-based gas, prior to forming the silicon nitride film on the surface of the object to be processed.
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