| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_09f6ec2b1f93c71f80479930a20e9d0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0e3687553467f6b262e5c974ef315c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b364cf4ca0b781d878fe243f36e3181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78678 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-12 |
| filingDate |
2010-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_873c7233d1174cea263aeb945d9dac93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d3c9589e03a91cc17f657bef7542425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ec15c770824e96c452947728bb5a415 |
| publicationDate |
2015-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9093328-B2 |
| titleOfInvention |
Semiconductor device having an oxide semiconductor with a crystalline region and manufacturing method thereof |
| abstract |
An oxide semiconductor layer which is intrinsic or substantially intrinsic and includes a crystalline region in a surface portion of the oxide semiconductor layer is used for the transistors. An intrinsic or substantially intrinsic semiconductor from which an impurity which is to be an electron donor (donor) is removed from an oxide semiconductor and which has a larger energy gap than a silicon semiconductor is used. Electrical characteristics of the transistors can be controlled by controlling the potential of a pair of conductive films which are provided on opposite sides from each other with respect to the oxide semiconductor layer, each with an insulating film arranged therebetween, so that the position of a channel formed in the oxide semiconductor layer is determined. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276642-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11202484-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672913-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11011652-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9882061-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11160328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10658522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950633-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016276487-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11791415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016380114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015333090-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9853066-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10622380-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581439-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9905705-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11588058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10153346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10290744-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017265561-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10622485-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637129-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217701-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11710745-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315954-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10079251-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11751635-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022005536-A1 |
| priorityDate |
2009-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |