| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f10554cc8b5557c8edc01fe803c4fec8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31e221e9da08b9d6948846259182cac0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_375e56c930a010a3edfedac830bb8bb1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate |
2012-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7548ae15bf5ee17691952d42befaa5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88c52e1a7f4d010152c6edba6357acf5 |
| publicationDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9072152-B2 |
| titleOfInvention |
Extreme ultraviolet light generation system utilizing a variation value formula for the intensity |
| abstract |
An apparatus used with a laser apparatus may include a chamber, a target supply for supplying a target material to a region inside the chamber, a laser beam focusing optical system for focusing a laser beam from the laser apparatus in the region, and an optical system for controlling a beam intensity distribution of the laser beam. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016044773-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9992856-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9451683-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9351388-B2 |
| priorityDate |
2010-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |