Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4141 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
filingDate |
2013-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1bb34dac01fe786ce9ad2399c77187b |
publicationDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9046482-B2 |
titleOfInvention |
Gas sensor and method for manufacturing the gas sensor |
abstract |
It is an object to provide a gas sensor which is formed by a simple manufacturing process. Another object is to provide a gas sensor whose manufacturing cost is reduced. A transistor which includes an oxide semiconductor layer in contact with a gas and which serves as a detector element of a gas sensor, and a transistor which includes an oxide semiconductor layer in contact with a film having a gas barrier property and which forms a detection circuit are formed over one substrate by the same process, whereby a gas sensor using these transistors may be formed. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639913-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019376924-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11300534-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11674918-B2 |
priorityDate |
2010-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |