| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ded1e80b56956c0afe517e513404d002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a5c85fc14688825bd43e637c1170aad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_715b88847b98f9ff3496076588b3f39b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5005fcaa2198430e230dfff140f4bb41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R29-22 |
| filingDate |
2009-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f1b72b494d48db24fa2ce3bab836a56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6762e433e7aac4b27094b7ce18901341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0c3f35afa9ba4f3a0ef6f6b07c7d8b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d9a7ad43fb3a1c341f08bc9441a0f68 |
| publicationDate |
2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9046464-B2 |
| titleOfInvention |
Device and method for detecting a substance using a thin film resonator (FBAR) having an insulating layer |
| abstract |
A device for detecting at least one substance of a fluid, has a piezoacoustic thin film resonator with a piezoelectric layer on which electrode layers are arranged, and an adsorption surface for adsorbing the fluid substance, wherein the piezoelectric and electrode layers and the adsorption surface are designed and arranged on each other such that by electrically activating the electrode layers, an excitation alternating field can be coupled into the piezoelectric layer. The thin film resonator can be excited to a resonance oscillation frequency f R which depends on an amount of the substance adsorbed on the adsorption surface because of an excitation alternating field coupled into the piezoelectric layer. An electrical insulating layer is arranged directly on a side of one of the electrode layers facing away from the piezoelectric layer. Particularly advantageous is the combination of an aluminum electrode layer and a silicon dioxide insulating layer. |
| priorityDate |
2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |