| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32681f1832d227fe8df23d12a37f67a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c65fcef233d8a639e40a75aae192a76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_978d24103a60ce064775a1499682df58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_365c70707aaad7a27f4cb30c6998cd38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ecec18e287394c657c5bf1749e75ac3e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B3-30 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B5-14 |
| filingDate |
2011-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d69d152e16469e4b7d0eaa82fd79e685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9f66fba6fa522b3ed74877cf27036d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86aa0cb181a97f036167006e91f21ff6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70b9ece819ff9a7685468d5ae0a40a2d |
| publicationDate |
2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9030798-B2 |
| titleOfInvention |
Electrostatic chuck |
| abstract |
An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface. |
| priorityDate |
2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |