patent/US-2009056112-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009056112-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ec030fc062b270c25327af9127bed3a
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-5313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-53174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B31-28
filingDate	2008-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fcea54d78da70edf300fbc714f8a84d
publicationDate	2009-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2009056112-A1
titleOfInvention	Electrostatic chuck member, method of manufacturing the same, and electrostatic chuck device
abstract	A plurality of protruded portions is formed through embossing and is distributed and arranged regularly or irregularly on an electrostatic chuck surface, and has a circular or almost circular top surface shape and a roundness (R) of 0.01 mm or more is applied to an edge part defined by an intersection of the top surface and a side surface and a portion to which the roundness is applied occupies a quarter of a height h of the protruded portion or more.
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Total number of triples: 304.