http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9029073-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J133-26 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J133-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-14 |
filingDate | 2013-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d839018f8ce1e1df25ebb714379d4ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3819fea49b4ed518c3e8d34f44c8a159 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_368f3adf309874820f1cd2166e6641b4 |
publicationDate | 2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-9029073-B2 |
titleOfInvention | Undercoat agent, and pattern formation method for layer containing block copolymer |
abstract | A undercoat agent used for performing phase separation of a layer formed on a substrate and containing a block copolymer having a plurality of blocks bonded, wherein the undercoat agent contains a resin component, the resin component is formed from a structural unit having an aromatic ring and a structural unit not having an aromatic ring, and the resin component has a group that can interact with the substrate, and also has a 3 to 7-membered, ether-containing cyclic group. |
priorityDate | 2012-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 501.