| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1211 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-845 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2013-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa57155a94ec485068066724e7721ca7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c4e3298da18c9d2ff41adeefe03f26a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a5f69c3f59b08f18c724a24f7736558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_826b4a7de7875602d334b86fca131fc2 |
| publicationDate |
2015-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8963248-B2 |
| titleOfInvention |
Semiconductor device having SSOI substrate with relaxed tensile stress |
| abstract |
A method comprises: forming a tensile SSOI layer on a buried oxide layer on a bulk substrate; forming a plurality of fins in the SSOI layer; removing a portion of the fins; annealing remaining portions of the fins to relax a tensile strain of the fins; and merging the remaining portions of the fins. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10998441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9761610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9842929-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649560-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9966387-B2 |
| priorityDate |
2012-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |