| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2af4fa54541ffebbf8d9c243383df60 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate |
2013-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b301d89289bfd44d2b296359f63b9312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eb35e1f613b043a32505b4015cd973e |
| publicationDate |
2015-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8932955-B1 |
| titleOfInvention |
Triple patterning NAND flash memory with SOC |
| abstract |
A NAND flash memory array is initially patterned by forming a plurality of sidewall spacers according along sides of patterned portions of material. The pattern of sidewall spacers is then used to form a second pattern of hard mask portions including first hard mask portions defined on both sides by sidewall spacers and second hard mask portions defined on only one side by sidewall spacers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615036-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021320007-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9390922-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109119328-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4224515-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9679771-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347583-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I706511-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015348775-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017358589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9570301-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9935116-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9934969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9305837-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430697-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10418244-B2 |
| priorityDate |
2013-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |