| abstract |
A sulfonium compound represented by formula (1), a photo-acid generator, and a method for producing a sulfonium compound are provided: n nwherein X represents an electron-donating group; R 1 and R 2 each represent an alkyl group, a cycloalkyl group, or the like; R 3 and R 4 each represent an arylene group or a heteroarylene group; R 5 and R 6 each represent an alkyl group, a cycloalkyl group, or the like; and A − and B − are anions that are different from each other. The sulfonium compound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern. |