| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14689
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14698
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N5-217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N5-335 |
| filingDate |
2013-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3046aa8af7c6ee20d82a52946651158f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80b4a94cd8e2903425f52fea986a6a4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c9cbe3f7248e6950215bc2f6497a3eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_120eb47d21b34ef9e8b55fad42db900c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d310fd2525f8fb4d7f15e8ef685405f |
| publicationDate |
2014-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8810700-B2 |
| titleOfInvention |
Front side implanted guard ring structure for backside |
| abstract |
A method of forming a backside illuminated image sensor includes forming a guard ring structure of a predetermined depth in a front-side surface of a semiconductor substrate, the guard ring structure outlining a two-dimensional array of pixels, each pixel of the array of pixels separated from an adjacent pixel by the guard ring structure. The method further includes forming at least one image sensing element on the front-side surface of the semiconductor substrate, the at least one image sensing element being formed in a pixel of the array of pixels and surrounded by the guard ring structure. The method further includes reducing a thickness of the semiconductor substrate until the guard ring structure is co-planar with a back-side surface of the semiconductor substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014209986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10868063-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9978793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9059360-B2 |
| priorityDate |
2009-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |