| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a31138b3a1e5b1ff7f738e2c24accb25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_564d73b5d54be9396ff3bd26c02e27e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57301a37aedf0542d29c7b1cc1704d57 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0437
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223 |
| filingDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c966081877dcdab9b27ddb8d73fb3781
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d223684b0f84d611ac3a18780d413442 |
| publicationDate |
2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8697552-B2 |
| titleOfInvention |
Method for ion implant using grid assembly |
| abstract |
A method of ion implantation comprising: providing a plasma within a plasma region of a chamber; positively biasing a first grid plate, wherein the first grid plate comprises a plurality of apertures; negatively biasing a second grid plate, wherein the second grid plate comprises a plurality of apertures; flowing ions from the plasma in the plasma region through the apertures in the positively-biased first grid plate; flowing at least a portion of the ions that flowed through the apertures in the positively-biased first grid plate through the apertures in the negatively-biased second grid plate; and implanting a substrate with at least a portion of the ions that flowed through the apertures in the negatively-biased second grid plate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9875922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015115796-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019326270-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937777-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9303314-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9324598-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9741894-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016148786-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9318332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8997688-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10553399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070538-B2 |
| priorityDate |
2009-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |