patent/US-5883391-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5883391-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-304
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
filingDate	1997-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1999-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cefe12ecebae7ad1def9d44bb26ecb59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2f8f781ec11341502a4a3ed33a03648 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07009162f3f091085afe6edd403837b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4119f1ea9b4d78fe7bc426b4fc85a81
publicationDate	1999-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5883391-A
titleOfInvention	Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process
abstract	High energy neutral contamination in an ion implanter can be caused by beam ions neutralised as they are temporarily accelerated at an electrode before being decelerated again to the desired implant energy. This occurs for example in the decel lens arrangement which includes an electrode at a relatively high negative potential to provide the required focusing. The level of this contamination is monitored by measuring the current drain on this negative field electrode.
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priorityDate	1996-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10125044 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419567691

Total number of triples: 73.