http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8536553-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1ad7531f008179e549fcf084aa5c4675 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2cc349a750e4d0303d11ab1c56701857 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df98ebc766872af3dc580f10379a75db http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1223bc57c508f61d83be5b3e1116aea http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f5b2c823cdbc819e45189c4f0b4fb8cf |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14634 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14692 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01T1-246 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01T1-24 |
| filingDate | 2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d647327ceee17e3d0951f43ab22fb2d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b13d457689f954f440c33c6c5be5ad39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fbeb283a1e2628101e929e79727a79a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00c42ddbdf93490633c679830b7bceb6 |
| publicationDate | 2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8536553-B2 |
| titleOfInvention | Apparatus and method for detecting radiation |
| abstract | An apparatus and method for detecting radiation are provided. The apparatus includes an upper electrode layer transmitting radiation; a first insulating layer blocking charges from the upper electrode layer; a photoconductive layer becoming photoconductive upon exposure to the radiation; a second insulating layer protecting the photoconductive layer from a plasma discharge; a lower substrate facing the second insulating layer; a plurality of barrier ribs defining a cell structure between the second insulating layer and the lower substrate; a gas layer included in an inner chamber inside the cell structure and generating a plasma discharge; a bottom electrode formed on the lower substrate; a first radio frequency (RF) electrode formed over the bottom electrode and connected to a ground source; a second RF electrode to which RF power for generating plasma is applied; and a third insulating layer surrounding the first and second RF electrodes and thus insulating the first and second RF electrodes from the gas layer and the bottom electrode. |
| priorityDate | 2010-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.