| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242789508fcc9b52c84a82ac211a6774
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7e7eed7519ff02efabec92b52f7d4af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d231147f38595bbe3114b758cba4a298
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab91a8689d80842db2b2ce19f276854f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2011-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9d2ca9e1f650eec4b1fbff81b674d40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6f662244d93a750f1f245c570b3f409 |
| publicationDate |
2013-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8481384-B2 |
| titleOfInvention |
Method for producing MIM capacitors with high K dielectric materials and non-noble electrodes |
| abstract |
A method of producing a Metal-Insulator-Metal (MIM) capacitor stack through doping to achieve low current leakage and low equivalent oxide thickness is disclosed. A high K dielectric material is deposited on a non-noble electrode; the dielectric material is doped with oxides from group IIA. The dopant increases the barrier height of metal/insulator interface and neutralizes free electrons in dielectric material, therefore reduces the leakage current of MIM capacitor. The electrode may also be doped to increase work function while maintaining a rutile crystalline structure. The method thereby enhances the performance of DRAM MIM capacitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015087130-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8969169-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9437420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013161789-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8674479-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013285205-A1 |
| priorityDate |
2011-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |