| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81016e404603e20800988f548742503f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a3447212145133be8e5847ec906521a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f670792bea15f96d463c33a1f873612 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249978
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249983
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249982
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24998
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B23-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0028 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B23-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-26 |
| filingDate |
2008-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b83d9ba09653ea68074bad17236094da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c42e1379fa6a436fde0817c2149ccde8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1754e81aa43d1d640cf7dbafb8c011a |
| publicationDate |
2013-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8460783-B2 |
| titleOfInvention |
Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these |
| abstract |
A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9131829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011229697-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011229675-A1 |
| priorityDate |
2002-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |