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titleOfInvention Method of forming high-k dielectric films based on novel titanium, zirconium, and hafnium precursors and their use for semiconductor manufacturing
abstract A method of forming on at least one support at least one metal containing dielectric films having the formula (M 1 1-a M 2 a ) O b N c , wherein: 0≦a<1, 01 and M 2 being metals Hf, Zr or Ti using precursors with pentadienyl ligands and/or cyclopentadienyl ligands.
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