| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a22104e3dfb30fcbc12cb00658d3a80a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00 |
| filingDate |
2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad7f218a12bcea6defb807bc1aa29537 |
| publicationDate |
2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8357614-B2 |
| titleOfInvention |
Ruthenium-containing precursors for CVD and ALD |
| abstract |
Disclosed are ruthenium-containing precursors and methods of using the same in CVD and ALD. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9938622-B2 |
| priorityDate |
2010-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |