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publicationDate 2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8357593-B2
titleOfInvention Methods of removing water from semiconductor substrates and methods of depositing atomic layers using the same
abstract Provided are methods of removing water adsorbed or bonded to a surface of a semiconductor substrate, and methods of depositing an atomic layer using the method of removing water described herein. The method of removing water includes applying a chemical solvent to the surface of a semiconductor substrate, and removing the chemical solvent from the surface of the semiconductor substrate.
priorityDate 2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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