| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_976a99c7b3a261abc8b64cf4f6fbf607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4efee27937b4a512f45809fed5293747
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_843ee1af427a355f694367f9dc1dab1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1700b7d80842f2e604980a35031fd3cd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate |
2011-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_110ace490c11e5c30b2ffc70dc1c5bb1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9894702d0bce8a9cbdf5e06f3aaba537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bcc504ec7be2f84447f0c6f6e981b91 |
| publicationDate |
2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8330245-B2 |
| titleOfInvention |
Semiconductor wafers with reduced roll-off and bonded and unbonded SOI structures produced from same |
| abstract |
The disclosure relates to preparation of silicon on insulator structures with reduced unbonded regions and to methods for producing such wafers by minimizing the roll-off amount (ROA) of the handle and donor wafers. Methods for polishing wafers are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10811307-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11367649-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11443978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8896964-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10096334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10128146-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9508374-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9799364-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9147421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11764198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9240201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017186693-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9806025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10242947-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9361925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10923427-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9653112-B2 |
| priorityDate |
2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |