| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_06318649c135f2c6e4b9fb5d9a388c16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfd95655f034cec8855e266f7264b399
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6fc8bbba7dbfdc1fe42f350fc84e17a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e27bcc12f9c432a2520b1c08c9e0df9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_63c6ea74d2349c06b052b764053a5ff9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a057c2c8693f8e5ba831db75ac2be2fb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
2007-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34caf486aaf00f32ff5054d516a42a10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0434d68486be4581b815a5e1d4420d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_578b7fc0a596a86ffdedf4a1c43dbe84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ac3ea7c0ad607f8d8ca530f3be859d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bb96228498140f254ab09b7884bc039 |
| publicationDate |
2012-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8323880-B2 |
| titleOfInvention |
Positive resist processing liquid composition and liquid developer |
| abstract |
Disclosed is a positive resist processing liquid composition which is composed of an aqueous solution containing a quaternary ammonium hydroxide represented by the following general formula (I). n n n n n n n n n n In the formula, R 1 and R 3 independently represent a methyl group, and R 2 represents an alkyl group having 12-18 carbon atoms. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11256173-B2 |
| priorityDate |
2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |