http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005221615-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c80ce13fc7cbdd2e0c9fdcb41bf725e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8174e98cc73d3c781dc8f321cd8ee21c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2d815e6a159a8271d7840b0989325b1
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B9-065
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B9-06
filingDate 2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebf750fd97f0196561bb53cc6b0a8e51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0170ec4398e803fc8b5f2f30cd4a3e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb83d5a89518f3827fefed98bb4ee8b0
publicationDate 2005-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005221615-A1
titleOfInvention Method of processing a substrate
abstract There is disclosed a method of processing a substrate, which comprises applying a surfactant or a water soluble polymer agent onto a surface of a substrate to be processed, and sliding a circumferential portion of the substrate and a polishing member against each other to polish the circumferential portion of the substrate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008221004-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110291618-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551922-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7939482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006269860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8323880-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7387970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010086882-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10466592-B2
priorityDate 2004-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004098924-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002028581-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003110803-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128882835
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128193010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129844352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127528285
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3776
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14972829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1032
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129842321
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127915187
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6568

Total number of triples: 54.